Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10866510 | Overlay improvement in nanoimprint lithography | Mario Johannes Meissl, Byung-Jin Choi | 2020-12-15 |
| 10578984 | Adaptive chucking system | Mario Johannes Meissl, Byung-Jin Choi | 2020-03-03 |
| 10553501 | Apparatus for use in forming an adaptive layer and a method of using the same | Mario Johannes Meissl | 2020-02-04 |