Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10689573 | Wet etching composition for substrate having SiN layer and Si layer and wet etching method using same | Akinobu HORITA, Kenji Shimada, Kenichi Takahashi, Aya Ito | 2020-06-23 |
| 10651028 | Semiconductor element cleaning solution that suppresses damage to tungsten-containing materials, and method for cleaning semiconductor element using same | Kenji Shimada | 2020-05-12 |
| 10629426 | Semiconductor element cleaning solution that suppresses damage to cobalt, and method for cleaning semiconductor element using same | Kenji Shimada | 2020-04-21 |
| 10538718 | Cleaning solution and cleaning method for material comprising carbon-incorporated silicon oxide for use in recycling wafer | Kenji Shimada | 2020-01-21 |