Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10689573 | Wet etching composition for substrate having SiN layer and Si layer and wet etching method using same | Kenji Shimada, Kenichi Takahashi, Toshiyuki Oie, Aya Ito | 2020-06-23 |