Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10692696 | Deflection scan speed adjustment during charged particle exposure | Teunis Van De Peut | 2020-06-23 |
| RE48046 | Lithography system, sensor and measuring method | Pieter Kruit, Erwin Slot, Tijs Frans Teepen, Stijn Willem Herman Karel Steenbrink | 2020-06-09 |
| 10600733 | Fabricating unique chips using a charged particle multi-beamlet lithography system | Marcel Nicolaas Jacobus van Kervinck, Vincent Sylvester Kuiper | 2020-03-24 |
| 10586625 | Vacuum chamber arrangement for charged particle beam generator | Alexander Hendrik Vincent Van Veen, Willem Henk Urbanus | 2020-03-10 |