Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10654193 | Methods and system for controlling a surface profile of a wafer | Carlos Zavattari, Sumeet S. Bhagavat, Vandan Tanna, Uwe Hermes | 2020-05-19 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10654193 | Methods and system for controlling a surface profile of a wafer | Carlos Zavattari, Sumeet S. Bhagavat, Vandan Tanna, Uwe Hermes | 2020-05-19 |