Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10545412 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Ramon Olavarria, Craig MacNaughton +1 more | 2020-01-28 |