Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10650508 | Automatic defect classification without sampling and feature selection | Wei Chang, Krishna Rao | 2020-05-12 |
| 10545412 | Statistical overlay error prediction for feed forward and feedback correction of overlay errors, root cause analysis and process control | Wei Chang, Krishna Rao, Joseph Gutierrez, Craig MacNaughton, Amir Azordegan +1 more | 2020-01-28 |