Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10754260 | Method and system for process control with flexible sampling | Onur N. Demirer, Roie Volkovich, Mark Wagner, Dana Klein | 2020-08-25 |
| 10707107 | Adaptive alignment methods and systems | Brent A. Riggs | 2020-07-07 |
| 10691028 | Overlay variance stabilization methods and systems | Hoyoung Heo, Jeremy Nabeth, Sanghuck Jeon, Onur N. Demirer, Miguel Garcia-Medina +1 more | 2020-06-23 |
| 10692227 | Determination of sampling maps for alignment measurements based on reduction of out of specification points | Brent A. Riggs, Onur N. Demirer | 2020-06-23 |