Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10847191 | Semiconductor device | — | 2020-11-24 |
| 10811268 | Substrate processing apparatus, substrate processing method, and semiconductor device fabrication method | Shinichi Ito, Seiji Morita, Ryosuke Yamamoto, Ryuichi Saito | 2020-10-20 |