Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879067 | Pattern forming method and method of manufacturing semiconductor device | Takashi Sato, Ryosuke Yamamoto | 2020-12-29 |
| 10811252 | Pattern-forming method | Ryosuke Yamamoto, Ryuichi Saito, Ryoichi Suzuki, Takeharu MOTOKAWA, Shinichi Ito +1 more | 2020-10-20 |
| 10811268 | Substrate processing apparatus, substrate processing method, and semiconductor device fabrication method | Yusuke Kasahara, Shinichi Ito, Ryosuke Yamamoto, Ryuichi Saito | 2020-10-20 |