Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10854466 | Etching method, method of manufacturing semiconductor chip, and method of manufacturing article | Keiichiro Matsuo, Mitsuo Sano, Kazuhito Higuchi, Kazuo Shimokawa | 2020-12-01 |