Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867801 | Etching apparatus and etching method | — | 2020-12-15 |
| 10854466 | Etching method, method of manufacturing semiconductor chip, and method of manufacturing article | Keiichiro Matsuo, Susumu Obata, Mitsuo Sano, Kazuo Shimokawa | 2020-12-01 |