Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10859439 | Reflectometer, spectrophotometer, ellipsometer or polarimeter system including sample imaging system that simultaneously meets scheimpflug condition and overcomes keystone error | Martin M. Lihardt, Ping He | 2020-12-08 |
| 10775298 | Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing | Christopher D. Hassler, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt | 2020-09-15 |