Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10775298 | Ellipsometer or polarimeter system having at least one rotating element which is driven by a motor comprising air bearing | Galen L. Pfeiffer, Jeffrey S. Hale, Craig M. Herzinger, Brian D. Guenther, Brooks A. Hitt | 2020-09-15 |