Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10795261 | Additive for resist underlayer film-forming composition and resist underlayer film-forming composition containing the same | Rikimaru Sakamoto | 2020-10-06 |
| 10613435 | Coating solution for resist pattern coating and method for forming pattern | Rikimaru Sakamoto | 2020-04-07 |