Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10879076 | Etching solution for selectively removing silicon-germanium alloy from a silicon-germanium/silicon stack during manufacture of a semiconductor device | Wen Dar Liu, Andrew J. Adamczyk | 2020-12-29 |
| 10870799 | Etching solution for selectively removing tantalum nitride over titanium nitride during manufacture of a semiconductor device | Wen Dar Liu | 2020-12-22 |
| 10711227 | TiN hard mask and etch residue removal | Wen Dar Liu, William Jack Casteel, Jr., Tianniu Chen, Rajiv Krishan Agarwal, Madhukar Bhaskara Rao | 2020-07-14 |
| 10556792 | Wafer level integrated MEMS device enabled by silicon pillar and smart cap | Chin-Min Lin, Cheng San Chou, Hsiang-Fu Chen, Wen-Chuan Tai, Ching-Kai Shen +2 more | 2020-02-11 |