Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10741457 | System for non radial temperature control for rotating substrates | Aaron Muir Hunter, Joseph M. Ranish | 2020-08-11 |
| 10571337 | Thermal cooling member with low temperature control | Lara Hawrylchak, Samuel C. Howells, Leonid M. Tertitski, Michael S. Liu, Dongming Iu +2 more | 2020-02-25 |