Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10877368 | Extreme ultraviolet mask blank with alloy absorber and method of manufacture | — | 2020-12-29 |
| 10763091 | Physical vapor deposition chamber particle reduction apparatus and methods | Sanjay Bhat, Majeed A. Foad | 2020-09-01 |
| 10747102 | Extreme ultraviolet mask blank with multilayer absorber and method of manufacture | — | 2020-08-18 |
| 10685821 | Physical vapor deposition processing systems target cooling | Sanjay Bhat, Vishwas Kumar Pandey | 2020-06-16 |