Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10788744 | Extreme ultraviolet lithography mask blank manufacturing system and method of operation therefor | Ralf Hofmann, Cara Beasley | 2020-09-29 |
| 10763091 | Physical vapor deposition chamber particle reduction apparatus and methods | Vibhu Jindal, Sanjay Bhat | 2020-09-01 |
| 10691013 | Extreme ultraviolet lithography system having chuck assembly and method of manufacturing thereof | — | 2020-06-23 |
| 10551731 | Glass ceramic for ultraviolet lithography and method of manufacturing thereof | Ralf Hofmann, Cara Beasley | 2020-02-04 |
| 10551732 | Extreme ultraviolet mask blank production system with thin absorber and manufacturing system therefor | Vinayak Vishwanath Hassan, Cara Beasley, Ralf Hofmann | 2020-02-04 |