Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10702971 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2020-07-07 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10702971 | Textured membrane for a multi-chamber carrier head | Jeonghoon Oh, Hung Chih Chen, Andrew J. Nagengast, Steven M. Zuniga, Thomas Brezoczky | 2020-07-07 |