Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867858 | Simultaneous metal patterning for 3D interconnects | — | 2020-12-15 |
| 10695804 | Equipment cleaning apparatus and method | Roman Mostovoy, Todd Egan | 2020-06-30 |
| 10629484 | Method of forming self-aligned via | Mihaela Balseanu | 2020-04-21 |