Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790119 | Plasma processing apparatus with post plasma gas injection | Vladimir Nagorny, Dixit V. Desai, Ryan Pakulski | 2020-09-29 |
| 10599039 | Strip process for high aspect ratio structure | Vijay M. Vaniapura, Li Hou | 2020-03-24 |
| 10580661 | Atomic layer etch process using plasma in conjunction with a rapid thermal activation process | — | 2020-03-03 |
| 10573532 | Method for processing a workpiece using a multi-cycle thermal treatment process | Michael X. Yang | 2020-02-25 |