Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10836018 | Substrate holding device, substrate holding member, and substrate holding method | Tomohiro Ishino | 2020-11-17 |
| 10770334 | Substrate holding device | Tomohiro Ishino | 2020-09-08 |
| 10755959 | Substrate holding device and method of manufacturing the same | Atsutoshi Iwabuchi | 2020-08-25 |
| 10748805 | Vacuum attraction member | — | 2020-08-18 |