Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10836018 | Substrate holding device, substrate holding member, and substrate holding method | Shinya Kikuchi | 2020-11-17 |
| 10770334 | Substrate holding device | Shinya Kikuchi | 2020-09-08 |