Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more | 2020-12-08 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10861708 | Three or more states for achieving high aspect ratio dielectric etch | Takumi Yanagawa, Nikhil Dole, Eric A. Hudson, Felix Kozakevich, John Holland +2 more | 2020-12-08 |