Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10607844 | Pitch reduction technology using alternating spacer depositions during the formation of a semiconductor device and systems including same | Baosuo Zhou, Ardavan Niroomand, Paul A. Morgan, Shuang Meng, Joseph Neil Greeley +1 more | 2020-03-31 |
| 10600648 | Silicon-based deposition for semiconductor processing | Tom A. Kamp | 2020-03-24 |