Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10714354 | Self limiting lateral atomic layer etch | Neema Rastgar, Michael Carl Drymon | 2020-07-14 |
| 10600648 | Silicon-based deposition for semiconductor processing | Mirzafer Abatchev | 2020-03-24 |