Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745589 | Chemical mechanical polishing (CMP) of cobalt-containing substrate | Xiaobo Shi, Joseph D. Rose, Timothy Joseph Clore, James Allen Schlueter, Mark Leonard O'Neill | 2020-08-18 |
| 10669449 | Composite abrasive particles for chemical mechanical planarization composition and method of use thereof | Hongjun Zhou, Jo-Ann Theresa Schwartz, Xiaobo Shi, Krishna P. Murella, Steven Charles Winchester +5 more | 2020-06-02 |