Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10745589 | Chemical mechanical polishing (CMP) of cobalt-containing substrate | Joseph D. Rose, Timothy Joseph Clore, James Allen Schlueter, Malcolm Grief, Mark Leonard O'Neill | 2020-08-18 |
| 10669449 | Composite abrasive particles for chemical mechanical planarization composition and method of use thereof | Hongjun Zhou, Jo-Ann Theresa Schwartz, Malcolm Grief, Krishna P. Murella, Steven Charles Winchester +5 more | 2020-06-02 |
| 10570313 | Dishing reducing in tungsten chemical mechanical polishing | Matthias Stender, Blake J. Lew | 2020-02-25 |