Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10639727 | Vacuum suction pad and substrate holder | Satoru Yamamoto, Masayuki Nakanishi | 2020-05-05 |
| 10632587 | Polishing apparatus and polishing method | Masayuki Nakanishi, Toshifumi Watanabe | 2020-04-28 |
| 10632588 | Polishing apparatus and pressing pad for pressing polishing tool | Masayuki Nakanishi, Yasuyuki MIYASAWA | 2020-04-28 |