Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784115 | Method of etching microelectronic mechanical system features in a silicon wafer | Feng Zhou, Ki Wook Jung, Ercan Mehmet Dede, Mehdi Asheghi | 2020-09-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784115 | Method of etching microelectronic mechanical system features in a silicon wafer | Feng Zhou, Ki Wook Jung, Ercan Mehmet Dede, Mehdi Asheghi | 2020-09-22 |