Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10784115 | Method of etching microelectronic mechanical system features in a silicon wafer | Feng Zhou, Ercan Mehmet Dede, Mehdi Asheghi, Kenneth E. Goodson | 2020-09-22 |
| 10685905 | Multi-layer cooling structure including through-silicon vias through a plurality of directly-bonded substrates and methods of making the same | Feng Zhou, Ercan Mehmet Dede | 2020-06-16 |
| 10679997 | Semiconductor device comprising work function metal pattern in boundary region and method for fabricating the same | Dong Oh Kim, Seok Han Park, Chan Yoon, Ki Seok Lee, Ho-In Lee +3 more | 2020-06-09 |