Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837115 | Pre-treatment composition before etching SiGe and method of fabricating semiconductor device using the same | Soojin Kim, Jung-Min Oh, Hyosan Lee, Donghyun Kim, Haksoo Kim +2 more | 2020-11-17 |
| 10800972 | Etching composition and method for fabricating semiconductor device by using the same | Ho-Young Kim, Sang Won Bae, Min-Goo Kim, Jung Hun Lim, Yong Jae Choi | 2020-10-13 |
| 10793775 | Etching composition and method for fabricating semiconductor device by using the same | Soo-Jin Kim, Jin-Hye Bae, Jung Hun Lim, Yong Jae Choi | 2020-10-06 |