Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10837119 | Microelectronic substrate electro processing system | Robert B. Moore, David Silvetti, Paul Z. Wirth, Randy Harris, Daniel J. Woodruff | 2020-11-17 |
| 10754252 | Apparatus for post exposure bake | Kyle M. Hanson, Viachslav Babayan | 2020-08-25 |
| 10655226 | Apparatus and methods to improve ALD uniformity | Paul R. McHugh, Karthik Ramanathan | 2020-05-19 |
| 10577712 | Electroplating apparatus with electrolyte agitation | Paul R. McHugh | 2020-03-03 |
| 10570526 | Electroplating wafers having a pattern induced non-uniformity | Paul R. McHugh | 2020-02-25 |