Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10790187 | Post-etch residue removal for advanced node beol processing | Makonnen Payne, WonLae Kim, Eric Hong, Sheng-Hung Tu, Chieh-Ju Wang +1 more | 2020-09-29 |
| 10651045 | Compositions and methods for etching silicon nitride-containing substrates | Steven M. Bilodeau, Wen-Haw Dai, Min-Chieh Yang, Sheng-Hung Tu, Hsing-Chen Wu +2 more | 2020-05-12 |
| 10577567 | Cleaning compositions for removing post etch residue | Makonnen Payne, WonLae Kim, Eric Hong, Sean Kim | 2020-03-03 |