Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651045 | Compositions and methods for etching silicon nitride-containing substrates | Emanuel I. Cooper, Steven M. Bilodeau, Wen-Haw Dai, Min-Chieh Yang, Sheng-Hung Tu +2 more | 2020-05-12 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10651045 | Compositions and methods for etching silicon nitride-containing substrates | Emanuel I. Cooper, Steven M. Bilodeau, Wen-Haw Dai, Min-Chieh Yang, Sheng-Hung Tu +2 more | 2020-05-12 |