Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10867776 | Physical vapor deposition in-chamber electro-magnet | Michael S. Cox, Miroslav Gelo, Dinkesh Somanna | 2020-12-15 |
| 10781518 | Gas cooled electrostatic chuck (ESC) having a gas channel formed therein and coupled to a gas box on both ends of the gas channel | Manoj A. Gajendra, Soundarrajan JEMBULINGAM | 2020-09-22 |
| 10714321 | Sputtering target with backside cooling grooves | Michael S. Cox, Jeonghoon Oh | 2020-07-14 |
| 10662520 | Method for recycling substrate process components | — | 2020-05-26 |