Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690414 | Multi-plane heater for semiconductor substrate support | Keith Gaff, Eric A. Pape | 2020-06-23 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10690414 | Multi-plane heater for semiconductor substrate support | Keith Gaff, Eric A. Pape | 2020-06-23 |