Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10707133 | Trench plug hardmask for advanced integrated circuit structure fabrication | Michael L. Hattendorf, Christopher P. Auth | 2020-07-07 |
| 10553430 | Technologies for inverting lithographic patterns and semiconductor devices including high aspect ratio structures | Christopher P. Auth | 2020-02-04 |