Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10770309 | Features for improving process uniformity in a millisecond anneal system | Markus Hagedorn, Christian Pfahler | 2020-09-08 |
| 10727140 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Michael vanAbbema | 2020-07-28 |