Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727140 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Alexandr Cosceev | 2020-07-28 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10727140 | Preheat processes for millisecond anneal system | Markus Lieberer, Christian Pfahler, Markus Hagedorn, Alexandr Cosceev | 2020-07-28 |