Issued Patents 2020
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763105 | Method for manufacturing grooved MOSFET device based on two-step microwave plasma oxidation | Xinyu Liu, Shengkai Wang, Yun Bai, Chengyue Yang | 2020-09-01 |
| 10750606 | Microwave plasma equipment and method of exciting plasma | Xinyu Liu, Shengkai Wang, Yun Bai | 2020-08-18 |
| 10734199 | Microwave plasma generating device for plasma oxidation of SiC | Xinyu Liu, Shengkai Wang, Yun Bai, Chengyue Yang | 2020-08-04 |
| 10699898 | Method for oxidizing a silicon carbide based on microwave plasma at an AC voltage | Xinyu Liu, Shengkai Wang, Yun Bai, Zhonglin Han, Xiaoli Tian +2 more | 2020-06-30 |
| 10680067 | Silicon carbide MOSFET device and method for manufacturing the same | Huajun Shen, Yun Bai, Jingtao Zhou, Chengyue Yang, Xinyu Liu +2 more | 2020-06-09 |