Issued Patents 2020
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10763105 | Method for manufacturing grooved MOSFET device based on two-step microwave plasma oxidation | Xinyu Liu, Yidan Tang, Shengkai Wang, Yun Bai | 2020-09-01 |
| 10734199 | Microwave plasma generating device for plasma oxidation of SiC | Xinyu Liu, Yidan Tang, Shengkai Wang, Yun Bai | 2020-08-04 |
| 10699898 | Method for oxidizing a silicon carbide based on microwave plasma at an AC voltage | Xinyu Liu, Shengkai Wang, Yun Bai, Yidan Tang, Zhonglin Han +2 more | 2020-06-30 |
| 10680067 | Silicon carbide MOSFET device and method for manufacturing the same | Yidan Tang, Huajun Shen, Yun Bai, Jingtao Zhou, Xinyu Liu +2 more | 2020-06-09 |