Issued Patents 2020
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10858246 | Semiconductor device, microphone and methods for forming a semiconductor device | Anna-Katharina Kaiser, Soenke Pirk, Juergen Steinbrenner, Julia-Magdalena Straeussnigg | 2020-12-08 |
| 10710874 | Micromechanical structure and method for manufacturing the same | Tobias Frischmuth, Guenter Denifl, Thomas Grille, Ursula Hedenig, Daniel Maurer +2 more | 2020-07-14 |
| 10629416 | Wafer chuck and processing arrangement | Rudolf Kogler, Juergen Steinbrenner, Wolfgang Dastel, Harald Huetter | 2020-04-21 |