Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10766766 | Method for processing a layer structure and microelectromechanical component | Andre Brockmeier, Wolfgang Friza | 2020-09-08 |
| 10710874 | Micromechanical structure and method for manufacturing the same | Tobias Frischmuth, Guenter Denifl, Thomas Grille, Ursula Hedenig, Markus Kahn +2 more | 2020-07-14 |