Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10689250 | MEMS component and production method for a MEMS component | Marc Fueldner, Stefan Barzen, Alfons Dehe | 2020-06-23 |
| 10570007 | MEMS assembly and method for producing a MEMS assembly | Bernd Goller | 2020-02-25 |