Issued Patents 2020
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840054 | Charged-particle source and method for cleaning a charged-particle source using back-sputtering | Elmar Platzgummer, Christoph Spengler | 2020-11-17 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840054 | Charged-particle source and method for cleaning a charged-particle source using back-sputtering | Elmar Platzgummer, Christoph Spengler | 2020-11-17 |