Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10840054 | Charged-particle source and method for cleaning a charged-particle source using back-sputtering | Mattia Capriotti, Christoph Spengler | 2020-11-17 |
| 10651010 | Non-linear dose- and blur-dependent edge placement correction | Christoph Spengler, Wolf Naetar | 2020-05-12 |