Issued Patents 2020
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10818504 | Method for producing a pattern of features by lithography and etching | Waikin Li, Danilo De Simone, Frederic Lazzarino | 2020-10-27 |
| 10732124 | Methods for detecting defects of a lithographic pattern | Philippe Leray | 2020-08-04 |