Issued Patents 2020
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 10658235 | Rework for metal interconnects using etch and thermal anneal | Terry A. Spooner, Chih-Chao Yang, Lawrence A. Clevenger | 2020-05-19 |
| 10585998 | Automated method for integrated analysis of back end of the line yield, line resistance/capacitance and process performance | Michael Rizzolo, Chih-Chao Yang | 2020-03-10 |